Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8822104 | Photomask | — | 2014-09-02 |
| 8368869 | Lithography apparatus with an optical fiber module | Ya-Chih Wang | 2013-02-05 |
| 8243260 | Lithography apparatus | — | 2012-08-14 |
| 8216946 | Patterning method | Hai-Han Hung, Ya-Chih Wang, Chien-Mao Liao, Shing-Yih Shih | 2012-07-10 |
| 7799697 | Patterning method in semiconductor manufacturing process including an array of rectangular blocks and filling features | Ya-Chih Wang | 2010-09-21 |