Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7666792 | Method for fabricating a deep trench in a substrate | Chung-Yen Chou, Hai-Han Hung, Shin-Yu Nieh | 2010-02-23 |
| 7479461 | Method of etching silicon anisotropically | Kristin Schupke | 2009-01-20 |
| 7101802 | Method for forming bottle-shaped trench | Chien-Jung Sun, Chang-Rong Wu | 2006-09-05 |