Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7341952 | Multi-layer hard mask structure for etching deep trench in substrate | Tzu-Ching Tsai, Yi-Nan Chen | 2008-03-11 |
| 7029753 | Multi-layer hard mask structure for etching deep trench in substrate | Tzu-Ching Tsai, Yi-Nan Chen | 2006-04-18 |
| 6900118 | Method for preventing contact defects in interlayer dielectric layer | Yan Chen, Yi-Nan Chen, Chang-Rong Wu | 2005-05-31 |
| 6727159 | Method of forming a shallow trench isolation in a semiconductor substrate | Yi-Nan Chen, Hsien-Wen Liu | 2004-04-27 |