Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386342 | Holistic analysis of multidimensional sensor data for substrate processing equipment | Chao Liu, Shifang Li, Andreas Schulze | 2025-08-12 |
| 8126694 | Modeling conductive patterns using an effective model | Zhuan Liu, Jiangtao Hu | 2012-02-28 |
| 7450225 | Correction of optical metrology for focus offset | Zhuan Liu, Ye Feng, Yongdong Liu | 2008-11-11 |