Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10656085 | High sensitivity real-time bacterial monitor | — | 2020-05-19 |
| 7492467 | Method and apparatus for measuring thickness and optical properties of a thin-film on a substrate | Vladimir Rubinstein | 2009-02-17 |
| 7469164 | Method and apparatus for process control with in-die metrology | — | 2008-12-23 |
| 6885467 | Method and apparatus for thickness decomposition of complicated layer structures | Vladimir Rubinstein | 2005-04-26 |
| 6801321 | Method and apparatus for measuring lateral variations in thickness or refractive index of a transparent film on a substrate | — | 2004-10-05 |
| 6762838 | Method and apparatus for production line screening | — | 2004-07-13 |
| 6678055 | Method and apparatus for measuring stress in semiconductor wafers | Yaron Ish-Shalom | 2004-01-13 |