Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7109037 | Water-based resist stripping liquid management apparatus and water-based resist stripping liquid management method | Yuko Katagiri, Shu Ogawa, Satoru Morita, Makoto Kikukawa | 2006-09-19 |
| 7101517 | Processing solution preparation and supply method and apparatus | Yuko Katagiri, Shu Ogawa, Yasuyuki Kobayakawa, Makoto Kikukawa, Yutaka Saito +1 more | 2006-09-05 |
| 6752545 | Alkali-based treating liquid, treating liquid adjusting method and equipment, treating liquid supplying method and equipment | Yuko Katagiri, Shu Ogawa, Satoru Morita, Makoto Kikukawa, Takahiro Hozan | 2004-06-22 |
| 6623183 | Developer producing equipment and method | Shu Ogawa, Satoru Morita, Makoto Kikukawa, Takahiro Hozan | 2003-09-23 |
| 6588927 | Purified developer producing equipment and method | Shu Ogawa, Satoru Morita, Makoto Kikukawa, Takahiro Hozan | 2003-07-08 |
| 6302600 | Apparatus for treating surface of boards | Hideo Nagase, Shu Ogawa, Kiyoshi Kamibayashi, Makoto Kikukawa, Takahiro Houzan +1 more | 2001-10-16 |
| 5896874 | Apparatus for controlling resist stripping solution | Kouzo Tsukada, Shu Ogawa, Takahiro Houzan, Yoshitaka Nishijima | 1999-04-27 |
| 5671760 | Apparatus for controlling resist stripping solution | Kouzo Tsukada, Shu Ogawa, Yoshitaka Sato, Shinichiro Shiotsu | 1997-09-30 |
| 5223881 | Apparatus for controlling developing solution | Kouzo Tsukada, Shu Ogawa, Shinichiro Shiotsu | 1993-06-29 |