Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5896874 | Apparatus for controlling resist stripping solution | Toshimoto Nakagawa, Shu Ogawa, Takahiro Houzan, Yoshitaka Nishijima | 1999-04-27 |
| 5671760 | Apparatus for controlling resist stripping solution | Toshimoto Nakagawa, Shu Ogawa, Yoshitaka Sato, Shinichiro Shiotsu | 1997-09-30 |
| 5223881 | Apparatus for controlling developing solution | Toshimoto Nakagawa, Shu Ogawa, Shinichiro Shiotsu | 1993-06-29 |