Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10823568 | Capacitive microelectromechanical accelerometer | Matti LIUKKU | 2020-11-03 |
| 10809279 | Capacitive microelectromechanical accelerometer | Matti LIUKKU | 2020-10-20 |
| 10429186 | Microelectromechanical device with motion limiters | Ville Ahtee | 2019-10-01 |
| 10429406 | Microelectromechanical structure with frames | — | 2019-10-01 |
| 10190938 | Semi-flexible proof-mass | Anssi Blomqvist, Matii Liukku | 2019-01-29 |
| 10137851 | MEMS sensor and a semiconductor package | Matti LIUKKU | 2018-11-27 |
| 10024881 | MEMS sensor | — | 2018-07-17 |
| 9897447 | Quadrature compensation | Anssi Blomqvist, Tommi PIIRAINEN | 2018-02-20 |
| 9764942 | Multi-level micromechanical structure | Antti Iihola, Altti Torkkeli, Matti LIUKKU | 2017-09-19 |
| 9651574 | Acceleration sensor structure and use thereof | Leif Roschier, Anssi Blomqvist | 2017-05-16 |
| 9575088 | Capacitive micromechanical acceleration sensor | Matti LIUKKU, Anssi Blomqvist | 2017-02-21 |
| 9547020 | Capacitive micromechanical sensor structure and micromechanical accelerometer | Matti LIUKKU | 2017-01-17 |
| 9415998 | Microelectromechanical structure with motion limiter | Ville Ahtee | 2016-08-16 |
| 9366690 | Vibration tolerant acceleration sensor structure | — | 2016-06-14 |
| 9279825 | Acceleration sensor structure and use thereof | Leif Roschier, Anssi Blomqvist | 2016-03-08 |