Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9594253 | Spectral apparatus, detection apparatus, light source apparatus, reaction apparatus, and measurement apparatus | Yohei Kobayashi, Akira Ozawa, Mamoru Endo, Makoto Gonokami | 2017-03-14 |
| 9372289 | Method of manufacturing a diffraction grating | Shigeru Sugiyama | 2016-06-21 |
| 9233512 | Manufacturing method of blazed diffraction grating and mold for making a blazed difraction grating | Tsuyoshi Kitamura | 2016-01-12 |
| 9201179 | Method of manufacturing blazed diffractive grating and method of manufacturing mold for manufacturing blazed diffractive grating | Yukinobu Okura | 2015-12-01 |
| 9031112 | Echelle diffraction grating and its manufacturing method, excimer laser and its manufacturing method | Tsuyoshi Kitamura | 2015-05-12 |
| 8774247 | Echelle diffraction grating, excimer laser, manufacturing method of Echelle diffraction grating, and ArF excimer laser | Tsuyoshi Kitamura, Yukinobu Okura | 2014-07-08 |
| 8564758 | Exposure apparatus and method of decreasing fluctuations in optical characteristics of projection system | Atsushi Shigenobu, Yasuo Hasegawa | 2013-10-22 |
| 8098927 | Imaging characteristics fluctuation predicting method, exposure apparatus, and device manufacturing method | — | 2012-01-17 |
| 7826036 | Scanning exposure apparatus and method of manufacturing device | — | 2010-11-02 |
| 4814678 | Speed control apparatus for motor | Tsutomu Omae, Toshihiko Matsuda, Masahiro Tobise | 1989-03-21 |
| 4808903 | Vector control system for induction motors | Takayuki Matsui, Toshiaki Okuyama, Junichi Takahashi | 1989-02-28 |