Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4318796 | Sputtering apparatus | Suehiro Kato, Takeshi Nakamura | 1982-03-09 |
| 4309266 | Magnetron sputtering apparatus | Takeshi Nakamura, Suehiro Kato | 1982-01-05 |
| 4290876 | Sputtering apparatus | Takeshi Nakamura, Suehiro Kato, Kenji Ando | 1981-09-22 |
| 4229506 | Piezoelectric crystalline film of zinc oxide and method for making same | Toshio Ogawa, Tasuku Mashio | 1980-10-21 |
| 4219608 | Piezoelectric crystalline film of zinc oxide and method for making same | Toshio Ogawa, Tasuku Mashio | 1980-08-26 |
| 4205117 | Piezoelectric crystalline film of zinc oxide and method for making same | Toshio Ogawa, Tasuku Mashio | 1980-05-27 |
| 4182793 | Piezoelectric crystalline film of zinc oxide | Toshio Ogawa, Tasuku Mashio | 1980-01-08 |