Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4464422 | Process for preventing oxidation of copper film on ceramic body | Atsuo Senda, Toru Kasanami | 1984-08-07 |
| 4410408 | Method of preparing zinc oxide film | Kenji Ando | 1983-10-18 |
| 4318796 | Sputtering apparatus | Hiroshi Nishiyama, Takeshi Nakamura | 1982-03-09 |
| 4309266 | Magnetron sputtering apparatus | Takeshi Nakamura, Hiroshi Nishiyama | 1982-01-05 |
| 4290876 | Sputtering apparatus | Hiroshi Nishiyama, Takeshi Nakamura, Kenji Ando | 1981-09-22 |