Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9541464 | Pressure sensor structure | — | 2017-01-10 |
| 9453775 | Pressure sensor | — | 2016-09-27 |
| 9442032 | Microelectromechanical pressure sensor with robust diaphragm | — | 2016-09-13 |
| 9184131 | Method of making a system-in-package device | — | 2015-11-10 |
| 8988017 | Resonator | — | 2015-03-24 |
| 8922098 | Method and device for energy harvesting | Anna-Maija Karkkainen, Jukka Kyynäräinen, Leif Roschier | 2014-12-30 |
| 8878421 | Energy harvesting/tire pressure, temperature and tire data transmitter | Katsutoshi Narita | 2014-11-04 |
| 8450816 | Method for manufacturing a microelectromechanical component; and a microelectromechanical component | — | 2013-05-28 |
| 8279615 | Encapsulation module method for production and use thereof | Bernhard Schmid, Roland Hilser, Altti Torkkeli | 2012-10-02 |
| 8124435 | Method for manufacturing a microelectromechanical component, and a microelectromechanical component | — | 2012-02-28 |
| 7982291 | Method for manufacturing a microelectromechanical component, and a microelectromechanical component | — | 2011-07-19 |
| 7932568 | Microelectromechanical component | Jiri Niemistö | 2011-04-26 |
| 7426863 | Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor | — | 2008-09-23 |
| 7302857 | Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction | Juha Lahdenpera, Risto Mutikainen | 2007-12-04 |
| 6998059 | Method for manufacturing a silicon sensor and a silicon sensor | Juha Lahdenpera, Risto Mutikainen | 2006-02-14 |
| 6938485 | Capacitive acceleration sensor | Juha Lahdenpera, Risto Mutikainen | 2005-09-06 |
| 6089106 | Force sensor assembly | Vihang C. Patel, Torbjorn Thuen, Jouni Hänninen | 2000-07-18 |
| 5083234 | Multilayer transducer with bonded contacts and method for implementation of bonding | Ari Lehto, Juha Lahdenpera | 1992-01-21 |
| 4875134 | Pressure sensor construction and method for its fabrication | — | 1989-10-17 |
| 4862317 | Capacitive pressure transducer | — | 1989-08-29 |
| 4831492 | Capacitor construction for use in pressure transducers | — | 1989-05-16 |
| 4628403 | Capacitive detector for absolute pressure | — | 1986-12-09 |
| 4609966 | Absolute pressure transducer | — | 1986-09-02 |
| 4594639 | Capacitive pressure detector | — | 1986-06-10 |
| 4589054 | Capacitive pressure detector independent of temperature | — | 1986-05-13 |