Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6177354 | Method of etching a substrate | Pawitter Mangat, William J. Dauksher | 2001-01-23 |
| 6039835 | Etching apparatus and method of etching a substrate | Pawitter Mangat, William J. Dauksher | 2000-03-21 |
| 4612274 | Electron beam/optical hybrid lithographic resist process in acoustic wave devices | Frederick Y. Cho, John R. Joseph | 1986-09-16 |