Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6693355 | Method of manufacturing a semiconductor device with an air gap formed using a photosensitive material | — | 2004-02-17 |
| 6475930 | UV cure process and tool for low k film formation | Kurt H. Junker, Marijean E. Azrak | 2002-11-05 |