Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7223624 | Micromechanical device with thinned cantilever structure and related methods | Guanghua Wu | 2007-05-29 |
| 6013933 | Semiconductor structure having a monocrystalline member overlying a cavity in a semiconductor substrate and process therefor | Juergen A. Foerstner, Henry G. Hughes | 2000-01-11 |
| 5683594 | Method for making diaphragm-based sensors and apparatus constructed therewith | G. Benjamin Hocker, David W. Burns, Akintunde I. Akinwande, Robert D. Horning, Thomas G. Stratton +3 more | 1997-11-04 |
| 5295395 | Diaphragm-based-sensors | G. Benjamin Hocker, David W. Burns, Akintunde I. Akinwande, Robert D. Horning, Thomas G. Stratton +3 more | 1994-03-22 |