Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6938629 | Rinsing lid for wet bench | — | 2005-09-06 |
| 6326574 | Sleeve for an adapter flange of the gasonics L3510 etcher | Chi-shu Huang | 2001-12-04 |
| 6273953 | Piping system for etch equipment | Chi-shu Huang, Ming-Yeng Wang, Jia-Rurng Hwu | 2001-08-14 |