Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7507437 | Method of wet coating for applying anti-reflective film to substrate | Hsing-ya Liu | 2009-03-24 |
| 6326574 | Sleeve for an adapter flange of the gasonics L3510 etcher | Chia-Lin Yeh | 2001-12-04 |
| 6273953 | Piping system for etch equipment | Chia-Lin Yeh, Ming-Yeng Wang, Jia-Rurng Hwu | 2001-08-14 |