Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10934633 | Multi-zone variable power density heater apparatus containing and methods of using the same | Rohit Bhosale, Jacqueline M. More, Sudarshan Natarajan, Joseph Patrick Reyes | 2021-03-02 |
| 10687393 | One-coat encapsulated graphite heater and process | Tomoo Hasegawa, Yoshihiko Matsui, Yuji Morikawa | 2020-06-16 |
| 10237921 | Cylindrical heater | — | 2019-03-19 |
| 8993939 | Resistance heater | Yuji Morikawa, Yoshihiko Matsui, Akinobu Otaka, Takeshi Higuchi, Kensuke Fujimura | 2015-03-31 |
| 8512806 | Large volume evaporation source | John Mariner, Douglas Alan Longworth, Donald William Pultz, Jr., Feng-Huei Liao, David M. Rusinko +1 more | 2013-08-20 |
| 8168050 | Electrode pattern for resistance heating element and wafer processing apparatus | — | 2012-05-01 |