Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8993939 | Resistance heater | Yuji Morikawa, Yoshihiko Matsui, Takeshi Higuchi, Kensuke Fujimura, Zhong-Hao Lu | 2015-03-31 |
| 8164028 | Resistance heater | Yuji Morikawa, Yoshihiko Matsui, Takeshi Higuchi, Kensuke Fujimura | 2012-04-24 |
| 7397648 | Electrostatic chuck including a heater mechanism | Kazuyoshi Yamazaki | 2008-07-08 |