Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9724665 | Apparatus for producing trichlorosilane and method for producing trichlorosilane | — | 2017-08-08 |
| 8828345 | Method for manufacturing trichlorosilane | — | 2014-09-09 |
| 8551439 | Method of refining carbon parts for production of polycrystalline silicon | Kenichi Watabe | 2013-10-08 |
| 8252241 | Apparatus for producing trichlorosilane and method for producing trichlorosilane | — | 2012-08-28 |
| 8221691 | Apparatus for producing trichlorosilane | Yuji Shimizu | 2012-07-17 |
| 8101131 | Chlorosilanes purifying apparatus and chlorosilanes manufacturing method | Teruhisa Kitagawa, Chikara Inaba | 2012-01-24 |
| 6846473 | Process for producing hexachlorodisilane | Seiichi Kirii, Hisayuki Takesue | 2005-01-25 |
| 5346557 | Process for cleaning silicon mass and the recovery of nitric acid | Hideo Ito, Kazuhiro Sakai | 1994-09-13 |