Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9533279 | Method and apparatus for manufacturing trichlorosilane | Noboru Tachino, Harumi Satoh | 2017-01-03 |
| 6846473 | Process for producing hexachlorodisilane | Seiichi Kirii, Mitsutoshi Narukawa | 2005-01-25 |