Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488573 | Polishing apparatus, polishing method and method of conditioning polishing pad | Tatsunori Kobayashi, Hiroshi Tanaka, Yasuyuki Ogata, Eturo Morita, Seiji Harada | 2002-12-03 |
| 6302772 | Apparatus and method for dressing a wafer polishing pad | Hiroshi Shibaya, Masahito Komasaki, Jiro Sano, Hiroyuki Kobayashi | 2001-10-16 |
| 6280306 | Wafer polishing apparatus and wafer manufacturing method | Hiroshi Shibaya, Masahito Komasaki, Jiro Sano, Kazuo Iizuka | 2001-08-28 |