Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11613809 | Solid vaporization/supply system of metal halide for thin film deposition | Hiroshi Matsumoto | 2023-03-28 |
| 11566326 | Vaporizable source material container and solid vaporization/supply system using the same | Hiroshi Matsumoto | 2023-01-31 |
| 7196211 | Hafnium-containing material for film formation, method for producing the same, and method for producing hafnium-containing thin film using the same | Nobuyuki Soyama, Akio Yanagisawa | 2007-03-27 |
| 7148367 | Organometallic compound, its synthesis method, and solution raw material and metal-containing thin film containing the same | — | 2006-12-12 |
| 6485554 | Solution raw material for forming composite oxide type dielectric thin film and dielectric thin film | Taiji Tachibana, Katsumi Ogi | 2002-11-26 |
| 6355097 | Organic titanium compound suitable for MOCVD | Taiji Tachibana, Hiroto Uchida, Katsumi Ogi | 2002-03-12 |
| 6310228 | Organic copper compound, liquid mixture containing the compound, and copper thin-film prepared using the solution | Katsumi Ogi | 2001-10-30 |
| 6280518 | Organic titanium compound suitable for MOCVD | Taiji Tachibana, Hiroto Uchida, Katsumi Ogi | 2001-08-28 |
| 5767302 | High-purity TI complexes, methods for producing the same and BST film-forming liquid compositions | Katsumi Ogi, Hiroto Uchida, Kazuo Wakabayashi | 1998-06-16 |
| 5696384 | Composition for formation of electrode pattern | Katsumi Ogi, Hiroto Uchida | 1997-12-09 |