Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7196211 | Hafnium-containing material for film formation, method for producing the same, and method for producing hafnium-containing thin film using the same | Atsushi Itsuki, Nobuyuki Soyama | 2007-03-27 |
| 7045645 | Ruthenium compounds, process for their preparation, and ruthenium-containing thin films made by using the compounds | Hideyuki Hirakoso, Masayuki Ishikawa, Katsumi Ogi | 2006-05-16 |