Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7205034 | Method and device for generating uniform high-frequency plasma over large surface area used for plasma chemical vapor deposition apparatus | Keisuke Kawamura, Akemi Takano, Hiroshi Mashima, Hiromu Takatuka, Yoshiaki Takeuchi +1 more | 2007-04-17 |