Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5800667 | Apparatus for adhering wafer to supporting substrate | Katsuya Kosaki | 1998-09-01 |
| 5801069 | Method of fabricating thin film piezoelectric device | Kenichi Harada, Osamu Ishihara, Kazuhiko Sato, Akiyoshi Kudo | 1998-09-01 |
| 5362658 | Method for producing semiconductor device | — | 1994-11-08 |