Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5979480 | Semiconductor production device, method of adjusting its internal pressure and method of processing an object of processing | — | 1999-11-09 |
| 5541127 | Manufacturing method of sidewall insulating film | Toshiaki Ogawa | 1996-07-30 |
| 5435886 | Method of plasma etching | Nobuo Fujiwara, Takahiro Maruyama, Kenji Kawai | 1995-07-25 |
| 5432367 | Semiconductor device having sidewall insulating film | Toshiaki Ogawa | 1995-07-11 |