Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8631762 | Plasma CVD apparatus, method for manufacturing semiconductor film, method for manufacturing thin-film solar cell, and method for cleaning plasma CVD apparatus | Mikio Yamamuka, Hiroya Yamarin | 2014-01-21 |
| 8507310 | Method for manufacturing thin-film photoelectric conversion device | Hidetada Tokioka, Hiroya Yamarin | 2013-08-13 |