Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5026668 | Apparatus and method for producing semiconductor device | Shunji Yamauchi, Minoru Tanaka, Yutaka Morita, Toru Kidera, Hiroki Mieda | 1991-06-25 |
| 4934920 | Apparatus for producing semiconductor device | Shunji Yamauchi, Minoru Tanaka, Yutaka Morita, Toru Kidera, Hiroki Mieda | 1990-06-19 |