Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5987737 | Gate break device and gate break method | Junzi Sakakibara, Takehiko Ikegami | 1999-11-23 |
| 5026668 | Apparatus and method for producing semiconductor device | Shunji Yamauchi, Minoru Tanaka, Kenitiro Sakamoto, Yutaka Morita, Toru Kidera | 1991-06-25 |
| 4997355 | Apparatus for producing semiconductor devices | Shunji Yamauchi | 1991-03-05 |
| 4934920 | Apparatus for producing semiconductor device | Shunji Yamauchi, Minoru Tanaka, Kenitiro Sakamoto, Yutaka Morita, Toru Kidera | 1990-06-19 |