Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950435 | SiC epitaxial wafer, method for manufacturing SiC epitaxial wafer, SiC device, and power conversion apparatus | Kenichi Hamano, Takuma Mizobe, Yasuhiro Kimura, Yoichiro Mitani | 2021-03-16 |
| 10858758 | Manufacturing method for silicon carbide epitaxial wafer and manufacturing method for silicon carbide semiconductor device | — | 2020-12-08 |
| 10711372 | Silicon carbide epitaxial wafer manufacturing method, silicon carbide semiconductor device manufacturing method and silicon carbide epitaxial wafer manufacturing apparatus | Kenichi Hamano, Takashi Kanazawa | 2020-07-14 |
| 10707075 | Semiconductor wafer, semiconductor device, and method for producing semiconductor device | Kenichi Hamano, Takuma Mizobe, Masashi Sakai, Yasuhiro Kimura, Yoichiro Mitani +1 more | 2020-07-07 |
| 10370775 | Silicon carbide epitaxial wafer manufacturing method, silicon carbide semiconductor device manufacturing method and silicon carbide epitaxial wafer manufacturing apparatus | Kenichi Hamano, Takashi Kanazawa | 2019-08-06 |
| 9957638 | Method for manufacturing silicon carbide semiconductor device | Yoichiro Mitani, Takahiro Yamamoto, Nobuyuki Tomita, Kenichi Hamano | 2018-05-01 |
| 9903048 | Single-crystal 4H-SiC substrate | Zempei Kawazu, Nobuyuki Tomita, Takanori Tanaka, Yoichiro Mitani, Kenichi Hamano | 2018-02-27 |
| 9824911 | Substrate support and semiconductor manufacturing apparatus | Zempei Kawazu | 2017-11-21 |
| 9752254 | Method for manufacturing a single-crystal 4H—SiC substrate | Zempei Kawazu, Nobuyuki Tomita, Takanori Tanaka, Yoichiro Mitani, Kenichi Hamano | 2017-09-05 |
| 9564315 | Manufacturing method and apparatus for manufacturing silicon carbide epitaxial wafer | Masashi Sakai, Yoichiro Mitani, Takahiro Yamamoto, Yasuhiro Kimura, Takuma Mizobe +1 more | 2017-02-07 |
| 9478418 | Method of manufacturing semiconductor element | Atsushi ERA, Takahiro Yamamoto | 2016-10-25 |
| 9422640 | Single-crystal 4H-SiC substrate | Zempei Kawazu, Nobuyuki Tomita, Takanori Tanaka, Yoichiro Mitani, Kenichi Hamano | 2016-08-23 |
| 9355841 | Manufacturing method of high electron mobility transistor | Takahiro Yamamoto, Atsushi ERA | 2016-05-31 |
| 8731018 | Semiconductor laser | Kimio Shigihara, Takuto Maruyama | 2014-05-20 |
| 8263999 | Nitride semiconductor light-emitting device | Kyosuke Kuramoto | 2012-09-11 |
| 7923742 | Method for production of a nitride semiconductor laminated structure and an optical semiconductor device | Masayoshi Takemi, Nobuyuki Tomita | 2011-04-12 |
| 7825012 | Method for manufacturing nitride semiconductor device | Masayoshi Takemi | 2010-11-02 |
| 7763486 | Method for manufacturing nitride semiconductor stacked structure and semiconductor light-emitting device | Masayoshi Takemi, Nobuyuki Tomita | 2010-07-27 |
| 7632695 | Semiconductor device manufacturing method | Masayoshi Takemi, Nobuyuki Tomita | 2009-12-15 |
| 7172429 | Method of manufacturing semiconductor light emitting device | Nobuyuki Tomita, Masayoshi Takemi | 2007-02-06 |