Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11518673 | MEMS device and method for manufacturing the same | Li-Tien Tseng, Chih-Liang Kuo | 2022-12-06 |
| 11312624 | MEMS device and manufacturing method thereof | Li-Tien Tseng | 2022-04-26 |
| 11137296 | Force sensor with MEMS-based device and force touching member | Li-Tien Tseng, Chih-Liang Kuo, Yu-Te Yeh | 2021-10-05 |
| 10538428 | MEMS device and method for manufacturing the same | Li-Tien Tseng, Chih-Liang Kuo | 2020-01-21 |
| 10486962 | Force sensor and manufacture method thereof | Li-Tien Tseng, Chih-Liang Kuo, Yu-Te Yeh | 2019-11-26 |
| 10040681 | Method and system for MEMS devices | Hua-Shu Wu, Shih-Yung Chung, Li-Tien Tseng, Yu-Te Yeh | 2018-08-07 |
| 9809447 | Pressure sensor | Li-Tien Tseng | 2017-11-07 |
| 9598275 | Pressure sensor and manufacture method thereof | Li-Tien Tseng | 2017-03-21 |
| 9278853 | Manufacturing process of MEMS device | Hua-Shu Wu, Shih-Yung Chung, Li-Tien Tseng, Yu-Te Yeh | 2016-03-08 |
| 9227832 | Pressure sensor and manufacture method thereof | Li-Tien Tseng | 2016-01-05 |
| 8754529 | MEMS device with simplified electrical conducting paths | Hua-Shu Wu, Shih-Yung Chung, Li-Tien Tseng, Yu-Te Yeh | 2014-06-17 |