Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468885 | Deposition of device quality, low hydrogen content, hydrogenated amorphous silicon at high deposition rates | Archie Harvin Mahan, Alan C. Gallagher, Brent P. Nelson, Eugene Iwaniczko, Yueqin Xu | 2002-10-22 |
| 6124186 | Deposition of device quality, low hydrogen content, hydrogenated amorphous silicon at high deposition rates with increased stability using the hot wire filament technique | Archie Harvin Mahan, Alan C. Gallagher | 2000-09-26 |
| 5776819 | "Deposition of device quality, low hydrogen content, amorphous silicon films by hot filament technique using ""safe"" silicon source gas" | Archie Harvin Mahan, Brent P. Nelson | 1998-07-07 |