Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468885 | Deposition of device quality, low hydrogen content, hydrogenated amorphous silicon at high deposition rates | Archie Harvin Mahan, Edith C. Molenbroek, Brent P. Nelson, Eugene Iwaniczko, Yueqin Xu | 2002-10-22 |
| 6124186 | Deposition of device quality, low hydrogen content, hydrogenated amorphous silicon at high deposition rates with increased stability using the hot wire filament technique | Edith C. Molenbroek, Archie Harvin Mahan | 2000-09-26 |
| 6121730 | Metal hydrides lamp and fill for the same | Shin Ukegawa | 2000-09-19 |
| 5397737 | Deposition of device quality low H content, amorphous silicon films | Archie Harvin Mahan, Jeffrey C. Carapella | 1995-03-14 |
| 5294465 | Microtip-controlled nanostructure fabrication and multi-tipped field emission tool for parallel-process nanostructure fabrication | — | 1994-03-15 |
| 5126574 | Microtip-controlled nanostructure fabrication and multi-tipped field-emission tool for parallel-process nanostructure fabrication | — | 1992-06-30 |
| 5015323 | Multi-tipped field-emission tool for nanostructure fabrication | — | 1991-05-14 |