| 7846776 |
Methods for releasably attaching sacrificial support members to microfeature workpieces and microfeature devices formed using such methods |
Michael B. Ball |
2010-12-07 |
| 7273817 |
Conditioning of a reaction chamber |
Bill Crane, John C. Gonzales, Steven Ott |
2007-09-25 |
| 7262136 |
Modified facet etch to prevent blown gate oxide and increase etch chamber life |
Thomas S. Kari, Mark Bossler |
2007-08-28 |
| 7022620 |
Conditioning of a reaction chamber |
Bill Crane, John C. Gonzales, Steven Ott |
2006-04-04 |
| 6762125 |
Modified facet etch to prevent blown gate oxide and increase etch chamber life |
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2004-07-13 |
| 6727158 |
Structure and method for forming a faceted opening and a layer filling therein |
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