Issued Patents All Time
Showing 51–69 of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8097537 | Phase change memory cell structures and methods | Eugene P. Marsh, Joseph Neil Greeley | 2012-01-17 |
| 8097175 | Method for selectively permeating a self-assembled block copolymer, method for forming metal oxide structures, method for forming a metal oxide pattern, and method for patterning a semiconductor structure | Dan B. Millward, J. Neil Greeley | 2012-01-17 |
| 8017184 | β-diketiminate ligand sources and metal-containing compounds thereof, and systems and methods including same | Dan B. Millward | 2011-09-13 |
| 8003521 | Semiconductor processing | Eugene P. Marsh | 2011-08-23 |
| 7858523 | Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same | Dan B. Millward, Stefan Uhlenbrock | 2010-12-28 |
| 7858815 | Systems and methods for forming tantalum oxide layers and tantalum precursor compounds | Brian A. Vaartstra | 2010-12-28 |
| 7709399 | Atomic layer deposition systems and methods including metal β-diketiminate compounds | — | 2010-05-04 |
| 7678708 | Systems and methods for forming metal oxide layers | Brian A. Vaartstra | 2010-03-16 |
| 7666801 | Systems and methods for forming metal oxides using metal compounds containing aminosilane ligands | Brian A. Vaartstra | 2010-02-23 |
| 7572731 | Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same | Dan B. Millward, Stefan Uhlenbrock | 2009-08-11 |
| 7482284 | Deposition methods for forming silicon oxide layers | Brian A. Vaartstra | 2009-01-27 |
| 7439195 | Systems and methods for forming metal oxides using metal compounds containing aminosilane ligands | Brian A. Vaartstra | 2008-10-21 |
| 7439338 | Beta-diketiminate ligand sources and metal-containing compounds thereof, and systems and methods including same | Dan B. Millward | 2008-10-21 |
| 7416994 | Atomic layer deposition systems and methods including metal beta-diketiminate compounds | — | 2008-08-26 |
| 7368402 | Systems and methods for forming tantalum oxide layers and tantalum precursor compounds | Brian A. Vaartstra | 2008-05-06 |
| 7332442 | Systems and methods for forming metal oxide layers | Brian A. Vaartstra | 2008-02-19 |
| 7115528 | Systems and method for forming silicon oxide layers | Brian A. Vaartstra | 2006-10-03 |
| 7087481 | Systems and methods for forming metal oxides using metal compounds containing aminosilane ligands | Brian A. Vaartstra | 2006-08-08 |
| 7030042 | Systems and methods for forming tantalum oxide layers and tantalum precursor compounds | Brian A. Vaartstra | 2006-04-18 |