Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7097546 | System and method for reducing surface defects in integrated circuits | — | 2006-08-29 |
| 6935926 | System and method for reducing surface defects in integrated circuits | — | 2005-08-30 |
| 6837773 | Method and apparatus for controlling a temperature of a polishing pad used in planarizing substrates | — | 2005-01-04 |
| 6682404 | Method for controlling a temperature of a polishing pad used in planarizing substrates | — | 2004-01-27 |
| 6533647 | Method for controlling a selected temperature of a planarizing surface of a polish pad. | — | 2003-03-18 |
| 6497612 | System and method for reducing surface defects in integrated circuits | — | 2002-12-24 |
| 6375544 | System and method for reducing surface defects integrated in circuits | — | 2002-04-23 |
| 6054015 | Apparatus for loading and unloading substrates to a chemical-mechanical planarization machine | Gina Garrison, Wade Van Buren | 2000-04-25 |
| 5957750 | Method and apparatus for controlling a temperature of a polishing pad used in planarizing substrates | — | 1999-09-28 |
| 5702292 | Apparatus and method for loading and unloading substrates to a chemical-mechanical planarization machine | Gina Garrison, Wade Van Buren | 1997-12-30 |