Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6054015 | Apparatus for loading and unloading substrates to a chemical-mechanical planarization machine | Thad Brunelli, Wade Van Buren | 2000-04-25 |
| 5702292 | Apparatus and method for loading and unloading substrates to a chemical-mechanical planarization machine | Thad Brunelli, Wade Van Buren | 1997-12-30 |