Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8627836 | Method and system for removal of contaminates from phaseshift photomasks | James Baugh | 2014-01-14 |
| 7300526 | Method and system for removal of contaminates from phaseshift photomasks | James Baugh | 2007-11-27 |
| 7008487 | Method and system for removal of contaminates from phaseshift photomasks | James Baugh | 2006-03-07 |