| 7375036 |
Anisotropic etch method |
— |
2008-05-20 |
| 6686295 |
Anisotropic etch method |
— |
2004-02-03 |
| 6461976 |
Anisotropic etch method |
— |
2002-10-08 |
| 6133156 |
Anisotropic etch method |
— |
2000-10-17 |
| 5958801 |
Anisotropic etch method |
— |
1999-09-28 |
| 5960314 |
Semiconductor processing method of providing an electrically conductive interconnecting plug between an elevationally conductive node and an elevationally outer electrically conductive node |
Howard E. Rhodes, Timothy P. O'Brien |
1999-09-28 |
| 5817573 |
Semiconductor processing method of providing an electrically conductive interconnecting plug between an elevationally inner electrically conductive node and an elevationally outer electrically conductive node |
Howard E. Rhodes, Timothy P. O'Brien |
1998-10-06 |
| 5496773 |
Semiconductor processing method of providing an electrically conductive interconnecting plug between an elevationally inner electrically conductive node and an elevationally outer electrically conductive node |
Howard E. Rhodes, Timothy P. O'Brien |
1996-03-05 |
| 5385629 |
After etch test method and apparatus |
Alan J. Lamberton |
1995-01-31 |
| 5380401 |
Method to remove fluorine residues from bond pads |
Curtis S. Jones, William J. Crane, Robin Lee Gilchrist |
1995-01-10 |
| 5271799 |
Anisotropic etch method |
— |
1993-12-21 |
| 5201993 |
Anisotropic etch method |
— |
1993-04-13 |
| 5169487 |
Anisotropic etch method |
William J. Crane |
1992-12-08 |
| 5094900 |
Self-aligned sloped contact |
— |
1992-03-10 |
| 4939105 |
Planarizing contact etch |
— |
1990-07-03 |
