| 6455400 |
Semiconductor processing methods of forming silicon layers |
Phillip G. Wald |
2002-09-24 |
| 6372662 |
Method of oxidizing a silicon surface |
Charles E. Carver, Clarence J. Higdon |
2002-04-16 |
| 6237979 |
Wafer carrier |
David Korn |
2001-05-29 |
| 6227590 |
Method of constructing a wafer carrier |
David Korn |
2001-05-08 |
| 6166395 |
Amorphous silicon interconnect with multiple silicon layers |
Phillip G. Wald |
2000-12-26 |
| 6120285 |
Dimpled thermal processing furnace and method for processing semiconductor wafers |
— |
2000-09-19 |
| 6096626 |
Semiconductor structures and semiconductor processing methods of forming silicon layers |
Phillip G. Wald |
2000-08-01 |
| 6092851 |
Wafer carrier having both a rigid structure and resistance to corrosive environments |
David Korn |
2000-07-25 |
| 6086127 |
Method of making a carrier for at least one wafer |
David Korn |
2000-07-11 |
| 5989718 |
Dielectric diffusion barrier |
Charles E. Carver, Clarence J. Higdon |
1999-11-23 |
| 5788304 |
Wafer carrier having both a rigid structure and resistance to corrosive environments |
David Korn |
1998-08-04 |
| 5645417 |
Dimpled thermal processing furnace tube |
— |
1997-07-08 |
