Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4708919 | Process for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structure | Alexander R. Shimkunas | 1987-11-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4708919 | Process for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structure | Alexander R. Shimkunas | 1987-11-24 |