Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4708919 | Process for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structure | James J. LaBrie | 1987-11-24 |
| 4696878 | Additive process for manufacturing a mask for use in X-ray photolithography and the resulting mask | — | 1987-09-29 |
| 4680243 | Method for producing a mask for use in X-ray photolithography and resulting structure | Barry Block | 1987-07-14 |
| 4671850 | Mask using polyimide to support a patterned x-ray opaque layer | — | 1987-06-09 |
| 4668336 | Process for making a mask used in x-ray photolithography | — | 1987-05-26 |
| 4608268 | Process for making a mask used in x-ray photolithography | — | 1986-08-26 |