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Selective provision of a diblock copolymer material |
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2009-12-01 |
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Methods of etching insulative materials, of forming electrical devices, and of forming capacitors |
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2006-05-02 |
| 6753262 |
Methods of etching insulative materials, of forming electrical devices, and of forming capacitors |
— |
2004-06-22 |
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Semiconductor structures formed using redeposition of an etchable layer |
Brent A. McClure |
2003-07-01 |
| 6528429 |
Methods of etching insulative materials, of forming electrical devices, and of forming capacitors |
— |
2003-03-04 |
| 6358857 |
Methods of etching insulative materials, of forming electrical devices, and of forming capacitors |
— |
2002-03-19 |
| 6331442 |
Pre-patterned contact fill capacitor for dielectric etch protection |
— |
2001-12-18 |
| 6297124 |
Method of improving alignment signal strength by reducing refraction index at interface of materials in semiconductors |
Thomas M. Graettinger |
2001-10-02 |
| 6133108 |
Dielectric etch protection using a pre-patterned via-fill capacitor |
— |
2000-10-17 |
| 6096571 |
Method of improving alignment signal strength by reducing refraction index at interface of materials in semiconductors |
Thomas M. Graettinger |
2000-08-01 |
| 6060785 |
Method of improving alignment signal strength by reducing refraction index at interface of materials in semiconductors |
Thomas M. Graettinger |
2000-05-09 |
| 6027860 |
Method for forming a structure using redeposition of etchable layer |
Brent A. McClure |
2000-02-22 |
| 5985676 |
Method of forming capacitor while protecting dielectric from etchants |
— |
1999-11-16 |
| 5933743 |
Method of improving alignment signal strength by reducing refraction index at interface of materials in semiconductors |
Thomas M. Graettinger |
1999-08-03 |
| 5824590 |
Method for oxidation and crystallization of ferroelectric material |
— |
1998-10-20 |
| 5801916 |
Pre-patterned contact fill capacitor for dielectric etch protection |
— |
1998-09-01 |
| 5792593 |
Method for forming a structure using redeposition of etchable layer |
Brent A. McClure |
1998-08-11 |
| 5650040 |
Interfacial etch of silica to improve adherence of noble metals |
— |
1997-07-22 |
| 5631804 |
Contact fill capacitor having a sidewall that connects the upper and lower surfaces of the dielectric and partially surrounds an insulating layer |
— |
1997-05-20 |
