| 8394679 |
Nano-structured gasket for cold weld hermetic MEMS package and method of manufacture |
Mark F. Eaton, Andrew Carl Miner |
2013-03-12 |
| 7576427 |
Cold weld hermetic MEMS package and method of manufacture |
— |
2009-08-18 |
| 7358106 |
Hermetic MEMS package and method of manufacture |
— |
2008-04-15 |
| 6586829 |
Ball grid array package |
Zvi Yaniv, Daniel Bullock |
2003-07-01 |
| 6292007 |
Probe head assembly |
— |
2001-09-18 |
| 6028437 |
Probe head assembly |
— |
2000-02-22 |
| 5347086 |
Coaxial die and substrate bumps |
David A. Gibson, Uttam S. Ghoshal |
1994-09-13 |
| 4922323 |
Hermetically sealed multilayer electrical feedthru |
— |
1990-05-01 |
| 4899439 |
Method of fabricating a high density electrical interconnect |
Lawrence N. Smith, Harry Kroger |
1990-02-13 |
| 4794021 |
Method of providing a planarized polymer coating on a substrate wafer |
— |
1988-12-27 |
| 4747908 |
Method of making a hermetically sealed multilayer electrical feedthru |
— |
1988-05-31 |
| 4681655 |
Electrical interconnect support system with low dielectric constant |
— |
1987-07-21 |
| 4681666 |
Planarization of a layer of metal and anodic aluminum |
Harry Kroger |
1987-07-21 |