Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581211 | Electrostatic chuck having a cooling structure | Hankyun Yoo | 2023-02-14 |
| 11309206 | Electro static chuck | Hankyun Yoo, Sangbum Cho | 2022-04-19 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581211 | Electrostatic chuck having a cooling structure | Hankyun Yoo | 2023-02-14 |
| 11309206 | Electro static chuck | Hankyun Yoo, Sangbum Cho | 2022-04-19 |