Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11963270 | Ceramic susceptor | Junghyun PARK, Junsung Lee | 2024-04-16 |
| 11581211 | Electrostatic chuck having a cooling structure | Jeonghun HWANG | 2023-02-14 |
| 11309206 | Electro static chuck | Jeonghun HWANG, Sangbum Cho | 2022-04-19 |