Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9498777 | Cells having cavities and the manufacture and use of the same | Henning Völlm, Ulrich Schmid, Andreas Schütze, Dara Feili | 2016-11-22 |
| 9028698 | Particle filter and manufacturing method therefor | Alois Friedberger, Peter Gluche | 2015-05-12 |
| 7862731 | Method for producing insulation structures | Matthias Aikele, Albert Engelhardt, Marcus Frey, Bernhard Schmid | 2011-01-04 |
| 7343801 | Micromechanical capacitive acceleration sensor | Konrad Kapser, Peter Knittl, Ulrich Prechtel, Sebastian Toelg, Manfred Weinacht | 2008-03-18 |
| 6564637 | Sensor having a resonance structure, especially an acceleration or rotation rate sensor, and a device for carrying out a self-test | Josef Schalk, Erwin Stenzel, Karin Bauer, Rainer Freitag, Roland Hilser +3 more | 2003-05-20 |
| 6483160 | Micromechanical enclosure | Albert Engelhardt, Bernhard Hartmann, Ulrich Prechtel | 2002-11-19 |
| 6474162 | Micromechanical rate of rotation sensor (DRS) | Ralf Voss, Karin Bauer, Matthias Rose, Erwin Stenzel, Josef Schalk +1 more | 2002-11-05 |
| 6389898 | Microsensor with a resonator structure | Matthias Aikele, Ulrich Prechtel, Oliver Nagler, Karl Kühl | 2002-05-21 |
| 6122965 | System for the measurement of acceleration in three axes | Josef Schalk, Ulrich Prechtel | 2000-09-26 |
| 5637885 | Method for producing a microsystem and forming a microsystem laser therefrom | Stefan Heinemann, Axel Mehnert, Peter Peuser, Nikolaus Schmitt | 1997-06-10 |
| 5572543 | Laser system with a micro-mechanically moved mirror | Stefan Heinemann, Axel Mehnert, Walter Kroy, Peter Peuser, Nikolaus Schmitt | 1996-11-05 |
| 5322258 | Micromechanical actuator | Dieter Bosch, Gunter Muck | 1994-06-21 |
| 5265113 | Integrated microsystem | Thorsteinn Halldorsson, Walter Kroy, Peter Peuser, Paul Zeller | 1993-11-23 |
| 5252294 | Micromechanical structure | Walter Kroy, Eduard Dette, Max Koniger, Peter Deimel, Florian Binder +1 more | 1993-10-12 |
| 4901565 | Strapdown measuring unit for angular velocities | Fritz Hofmann | 1990-02-20 |
| 4885781 | Frequency-selective sound transducer | — | 1989-12-05 |
| 4848871 | Fiber optic sensor for detecting mechanicl quantities | Peter Deimel | 1989-07-18 |