Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7862731 | Method for producing insulation structures | Albert Engelhardt, Marcus Frey, Bernhard Schmid, Helmut Seidel | 2011-01-04 |
| 6564637 | Sensor having a resonance structure, especially an acceleration or rotation rate sensor, and a device for carrying out a self-test | Josef Schalk, Erwin Stenzel, Karin Bauer, Rainer Freitag, Roland Hilser +3 more | 2003-05-20 |
| 6389898 | Microsensor with a resonator structure | Helmut Seidel, Ulrich Prechtel, Oliver Nagler, Karl Kühl | 2002-05-21 |