Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9029071 | Silicon oxynitride film formation method and substrate equipped with silicon oxynitride film formed thereby | Tatsuro Nagahara, Yusuke Takano | 2015-05-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9029071 | Silicon oxynitride film formation method and substrate equipped with silicon oxynitride film formed thereby | Tatsuro Nagahara, Yusuke Takano | 2015-05-12 |